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CEA-Leti promotes LETI-3S (Silicon Specialty Solutions) collaboration mode on 200mm and 300mm platforms

May 03, 2012 // Julien Happich

CEA-Leti promotes LETI-3S (Silicon Specialty Solutions) collaboration mode on 200mm and 300mm platforms

CEA-Leti now promotes a new collaboration mode for a wide range of industry oriented customers from start-ups to manufacturers. LETI-3S for Silicon Specialty Solutions is targeting start-ups, component integrators, fabless or fablite companies, equipment or consumable suppliers.

Other entities should be concerned such as foundries or research centers with a limited processes offer, micro and nanotechnologies companies who don't want low-volume activities, and high-value silicon wafers dealers.


3S addresses following main domains:

  • - Deposition
  • - Front Side/Back Side cleanings, wet etch and stripping
  • - Lithography with dual side alignment capability. LETI-3S can provide generic masks but usually works on customer designs adapted to CEA-Leti lithography tools.
  • - Etching
  • - Implantation, epitaxy, diffusion
  • - CMP, bonding, grinding, dicing
  • - Advanced in-line metrology

LETI-3S is operated on the Minatec Campus in Grenoble on 24/7 200mm and 300mm technological platforms. Lower wafer sizes should be available thanks to an innovative holder technology. LETI-3S can provide substrates or work on customers wafers, pre-processed or not, through stringent contamination protocols. LETI-3S ensures a full traceability from process flow conception to products delivery.

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