Hard mask development taps use of nanocrystals
March 08, 2012 // Nicolas Mokhoff
Pixelligent, a provider of nanocrystal additives, and Brewer Science are using their nanocrystal and microelectronic coating technologies to create a next-generation spin-on hard mask for semiconductor lithography processes.
Pixelligent Technologies collaborated with Brewer Science with support from National Science and Technology Institute (NIST) providing an $8 million Technology Innovation Program award.
“We have worked very closely with Pixelligent over the past 2 years and have been impressed by their unique capability for producing 2-5 nm diameter, high-purity metal oxide nanocrystals that are stably dispersed in organic media,” said Tony Flaim, CTO of Brewer Science, in a statement.
When commercialized, the new hard mask will be available in Brewer Science’s OptiStack system of lithography solutions.
Pixelligent’s zirconia and hafnia nanocrystals are used to magnify the optical, electronic, thermal, and mechanical properties of numerous polymer systems. Brewer Science is a process integration house.
Pixelligent will demonstrate results at the June Nanotech Conference & Expo 2012.
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