Laser-based optical lithography to yield a resolution of 2nm half-pitch lines
January 04, 2012 // Julien Happich
In a paper to be presented at SPIE Advanced Lithography 2012 in February, Storex Technologies will disclose a novel optical lithography technique which it claims offers a resolution of 2nm half-pitch lines. In its “2nm Quantum Optical Lithography” presentation, the company details a quantum optical method to do sub-wavelength lithography, achievable using existing technology.
Using atomic force microscope (AFM), scanning electron microscope (SEM) and transmission electron microscope (TEM) measurements, Dr. Eugen Pavel, CEO of Storex Technologies and his team have demonstrated that 2nm width lines could be written in novel materials such as fluorescent photosensitive glass-ceramics doped with samarium (Sm), relying on a quantum multi-photon confinement effect.
The researchers focused a 650nm wavelength laser diode beam to write high-density lines (3D patterning) on the novel materials at room temperature far beyond the diffraction limit, a fundamental barrier to the exploitation of optical lithography.
AFM image of a single 2nm line covered by 1.5 nm Au spheres.
This direct laser writing process (without any annealing process) involves quantum nonlinear effects which could enable full-wafer-level nanofabrication at a 2nm resolution, with demonstrated channel depths ranging from 1.5 to 5nm. Storex Technologies has developed a dynamic tester with a xyz piezo stage for controlling the laser at small velocity (200 micron/s) and a rotation disc system for high velocity (over 20m/s). The scope of this research is to increase the density of optical data storage by using the third dimension to store data using nanostructures. For instance, the surface storage density accessible with focused beams of light (without near-field techniques) is roughly 1/λ2, says the paper. With a green light wavelength of 532nm, this should lead to 4 bits μm−2 or more than 4 Gigabytes on each side of a 120mm diameter 1mm thick disk. But by storing data throughout the volume at a density of 1/λ3, the capacity of the same disk could be increased 2000-fold, to 8 Terabytes. Storex Technologies is working on improving the resolution below 2nm and is currently looking at industrializing its process.
Visit Storex Technologies at www.storextechnologies.com
When did analog steal digital's mojo?
May 28, 2015
Name two semiconductor companies whose names begin with the letter T that used to mainly make digital ICs but now think analog ...
NXP agrees RF power business sell off
Merck invests 7m euros to open OLED Application Center
Try out Intersil's latest step-down power module
Exploring new dimensions for HMI technology
Smartening up power monitoring
May 28, 2015
A recent survey from Gartner Research reports that in 2014 Microchip Technology was ranked as the top 8-bit and 16-bit MCU ...
R&D centre advances simulation technology for car developers
Xray sensor startup raises funds
IoT is driving an analog opportunity
- Integrating GPS into consumer products
- Controlling LED Lighting Using Triacs and Quadracs
- Automotive Designs Demand Low EMI Synchronous Buck Converters
- Smart Capacitive Design Tips
InterviewCEO interview: What's next after Tower's turn-around?
May 2015 marks the tenth anniversary of Russell Ellwanger taking over as CEO of speciality foundry Tower Semiconductor Ltd. (Migdael Haemek, Israel), which now trades as TowerJazz. And so EE Times Europe ...
Filter WizardCheck out the Filter Wizard Series of articles by Filter Guru Kendall Castor-Perry which provide invaluable practical Analog Design guidelines.
Linear video channel
READER OFFERRead more
In this month's reader offer, Analog Devices is giving away five Blackfin Low-Power Imaging Platform (BLIP) Development Systems (ADZS-BF707-BLIP2), worth 199 dollars each, for EETimes Europe's readers to win.
Targeting demanding ultra-low-power, real-time applications for image sensing and advanced audio, the development platform leverages the company’s ADSP-BF707BBCZ-4 Blackfin processor as...MORE INFO AND LAST MONTH' WINNERS...
December 15, 2011 | Texas instruments | 222901974
Unique Ser/Des technology supports encrypted video and audio content with full duplex bi-directional control channel over a single wire interface.