Laser-based optical lithography to yield a resolution of 2nm half-pitch lines
January 04, 2012 // Julien Happich
In a paper to be presented at SPIE Advanced Lithography 2012 in February, Storex Technologies will disclose a novel optical lithography technique which it claims offers a resolution of 2nm half-pitch lines. In its “2nm Quantum Optical Lithography” presentation, the company details a quantum optical method to do sub-wavelength lithography, achievable using existing technology.
Using atomic force microscope (AFM), scanning electron microscope (SEM) and transmission electron microscope (TEM) measurements, Dr. Eugen Pavel, CEO of Storex Technologies and his team have demonstrated that 2nm width lines could be written in novel materials such as fluorescent photosensitive glass-ceramics doped with samarium (Sm), relying on a quantum multi-photon confinement effect.
The researchers focused a 650nm wavelength laser diode beam to write high-density lines (3D patterning) on the novel materials at room temperature far beyond the diffraction limit, a fundamental barrier to the exploitation of optical lithography.
AFM image of a single 2nm line covered by 1.5 nm Au spheres.
This direct laser writing process (without any annealing process) involves quantum nonlinear effects which could enable full-wafer-level nanofabrication at a 2nm resolution, with demonstrated channel depths ranging from 1.5 to 5nm. Storex Technologies has developed a dynamic tester with a xyz piezo stage for controlling the laser at small velocity (200 micron/s) and a rotation disc system for high velocity (over 20m/s). The scope of this research is to increase the density of optical data storage by using the third dimension to store data using nanostructures. For instance, the surface storage density accessible with focused beams of light (without near-field techniques) is roughly 1/λ2, says the paper. With a green light wavelength of 532nm, this should lead to 4 bits μm−2 or more than 4 Gigabytes on each side of a 120mm diameter 1mm thick disk. But by storing data throughout the volume at a density of 1/λ3, the capacity of the same disk could be increased 2000-fold, to 8 Terabytes. Storex Technologies is working on improving the resolution below 2nm and is currently looking at industrializing its process.
Visit Storex Technologies at www.storextechnologies.com
Alps Electric puts cash into Qualtre
December 18, 2014
Alps Electric Co. Ltd. (Tokyo, Japan), a maker of electronics components and infotainment systems, has participated in a ...
China VC lifts sensor startup to record funding
MIT discovers superconductor law
Infrared makes multi-finger gesture control affordable
Smart window tints and acts as transparent battery
Reference design spotlights high-power LED lighting applications
December 17, 2014
Power Integrations has introduced a reference design for LED streetlights, high-bay lights and other high-power LED-lighting ...
Tiny spectrometer targets IoT
Feeding scrap plastic into your designs
LG adds quantum dot technology to 4K ULTRA HD TVs
- New life for Embedded systems in the Internet of Things
- Virtualization and the Internet of Things
- RF/Microwave Instrumentation “S” Series Amplifiers
- Application Guide to RF Coaxial Connectors and Cables
InterviewCEO interview: Bosch's IoT startup is all about the system
Thorsten Mueller, CEO of Bosch Connected Devices and Solutions GmbH (Reutlingen, Germany), has been guiding the latest startup subsidiary of Robert Bosch GmbH since 2013 when he started the initiative ...
Filter WizardCheck out the Filter Wizard Series of articles by Filter Guru Kendall Castor-Perry which provide invaluable practical Analog Design guidelines.
Linear video channel
READER OFFERRead more
This month, Arrow Electronics is giving away ten BeMicro Max 10 FPGA evaluation boards together with an integrated USB-Blaster, each package being worth 90 Euros, for EETimes Europe's readers to win.
Designed to get you started with using an FPGA, the BeMicro Max 10 adopts Altera's non-volatile MAX 10 FPGA built on 55-nm flash process.
The MAX 10 FPGAs are claimed to revolutionize...MORE INFO AND LAST MONTH' WINNERS...
December 15, 2011 | Texas instruments | 222901974
Unique Ser/Des technology supports encrypted video and audio content with full duplex bi-directional control channel over a single wire interface.