Mapper opens Russian MEMS fab
July 07, 2014 // Peter Clarke
Mapper Lithography BV (Delft, The Netherlands), a pioneer of the use of direct-write e-beam to characterize photoresist for chip production, has established a MEMS manufacturing site in Moscow for the production of e-beam deflection lens components for inclusion in its lithography systems.
The creation of the production facility follows on from the announcement in 2012 that Russia's Rusnano would invest about €40 million (about $50 million) in Mapper. Rusnano is a government owned investment fund aimed at commercializing developments in nanotechnology and one condition of the Mapper investment was that part of the research and manufacturing then in Delft would move to Moscow.
The MEMS factory is located in Technopolis in Moscow and will have the capacity to produce enough lens elements for 20 Mapper lithography machines per year, according Rusnano. Mapper has invested 1 billion rubles (about $30 million) in creating the wafer fab.
It is intended to produce three types of electronic optics at the Moscow plant. The simplest of them are spacers, which are used to separate electronic optical elements. Next in order of complexity are silicon electronic lenses for focusing and collimation of electron beams. They will come into production by the end of 2014. Production of the most complex elements, containing electronics for control electrodes, is scheduled to begin by the end of 2015.
Inside Mapper's Moscow MEMS wafer fab. Source: Rusnano.
Mapper's lithography system works using an e-beam split into multiple sub-beams that are passed through a MEMS-based projection system to cast a digital image on to photoresist. E-beams have been used before but a single e-beam takes an impractically long time to write a whole die and is the main reason e-beam lithography has been used mainly for R&D to date. However, Mapper's system can be expanded to thousands of beams and the company has worked closely with CEA-Leti (Grenoble, France) and foundry Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).All news
ADCs for high dynamic range – successive-approximation or sigma-delta?
September 01, 2014
Maithil Pachchigar, an applications engineer with Analog Devices Inc., looks at trade-offs that must be considered when choosing ...
Microchip in Pursuit of CSR
Samsung Funds III-V FinFETs in US Lab
A question of Europe
Trinamic's stepper motor package gets you started
Winged parcel delivery: Google's way
August 29, 2014
While there is still debate about if legislation would ever allow swarms of commercial drones to fly over our heads, Google ...
Two-inch Super AMOLED display fits Samsung smartwatch plans
UK armed forces consider lithium sulfur batteries
Small cell market to hit $4.8 billion in five years
- Power Modules: The New Super Power
- Flexible Performance for Network Security Appliances
- Digital Power Management Reduces Energy Costs While Improving System Performance
- Using RF Recording Techniques to Resolve Interference Problems
InterviewA question of Europe
Sir Peter Bonfield sits on the board and has advisory roles in many international companies and universities. With more than 45 years of experience in electronics, computers and communications, here he ...
Filter WizardCheck out the Filter Wizard Series of articles by Filter Guru Kendall Castor-Perry which provide invaluable practical Analog Design guidelines.
Linear video channel
READER OFFERRead more
This month, Trinamic Motion Control is offering you to win one of four TMCM-1043 development kits for its highly integrated, NEMA 17-compatible TMCM-1043 stepDancer stepper motor module.
Offering designers an easy-to-use PC-based GUI that allows one-click modification of motor drive current, micro-stepping and other key parameters, the intuitive kits are custom designed and developed for...MORE INFO AND LAST MONTH' WINNERS...
December 15, 2011 | Texas instruments | 222901974
Unique Ser/Des technology supports encrypted video and audio content with full duplex bi-directional control channel over a single wire interface.