Mapper opens Russian MEMS fab
July 07, 2014 // Peter Clarke
Mapper Lithography BV (Delft, The Netherlands), a pioneer of the use of direct-write e-beam to characterize photoresist for chip production, has established a MEMS manufacturing site in Moscow for the production of e-beam deflection lens components for inclusion in its lithography systems.
The creation of the production facility follows on from the announcement in 2012 that Russia's Rusnano would invest about €40 million (about $50 million) in Mapper. Rusnano is a government owned investment fund aimed at commercializing developments in nanotechnology and one condition of the Mapper investment was that part of the research and manufacturing then in Delft would move to Moscow.
The MEMS factory is located in Technopolis in Moscow and will have the capacity to produce enough lens elements for 20 Mapper lithography machines per year, according Rusnano. Mapper has invested 1 billion rubles (about $30 million) in creating the wafer fab.
It is intended to produce three types of electronic optics at the Moscow plant. The simplest of them are spacers, which are used to separate electronic optical elements. Next in order of complexity are silicon electronic lenses for focusing and collimation of electron beams. They will come into production by the end of 2014. Production of the most complex elements, containing electronics for control electrodes, is scheduled to begin by the end of 2015.
Inside Mapper's Moscow MEMS wafer fab. Source: Rusnano.
Mapper's lithography system works using an e-beam split into multiple sub-beams that are passed through a MEMS-based projection system to cast a digital image on to photoresist. E-beams have been used before but a single e-beam takes an impractically long time to write a whole die and is the main reason e-beam lithography has been used mainly for R&D to date. However, Mapper's system can be expanded to thousands of beams and the company has worked closely with CEA-Leti (Grenoble, France) and foundry Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).All news
Dual 13A or single 26A μModule regulator integrates digital power system management
July 25, 2014
Datacenters and server farms contain vast amounts of digital electronics, such as ASICs, FPGAs and CPUs. Powering, monitoring ...
What's that smell? An app for that soon, says Sensirion
GE phosphor powder creates more vibrant LED displays
Foremost Electronics to distribute NKK's switches in the UK
Traffic light switches to smart mode
Sony investing in stacked image sensor manufacturing capacity
July 24, 2014
Sony Corp. has said it plans to invest 35 billion yen (about $340 million) to increase its production of stacked CMOS image ...
The Filter Wizard: 'three-legs' and the 4-20 mA current loop
Set-top boxes morphing into MHGs
Imagination positions itself for 802.11ah for the Internet of Things
- Testing GPS with a Simulator
- DSM presents: Select the best plastic for DDR4
- Dual 13A μModule Regulator with Digital Interface for Remote Monitoring & Control of Power
- Exploring the Business Model Evolution of High-Tech Equipment Manufacturers
InterviewCEO interview: China, not Apple, is way to go, says mCube CEO
Ben Lee, CEO of MEMS startup mCube, explains why he wants to spend $37 million on being a supplier of sensors to Chinese ODMs and avoiding a design win with Apple or Samsung.
Filter WizardCheck out the Filter Wizard Series of articles by Filter Guru Kendall Castor-Perry which provide invaluable practical Analog Design guidelines.
Linear video channel
READER OFFERRead more
This month, Altium Ltd is offering EETimes Europe's readers the chance to win one TASKING VX-Toolset for ARM Cortex-M Premium Edition, normally licensed for 2.395 Euros, for ultra-rapid prototyping and code development around ARM Cortex-M based microcontrollers.
The VX-toolset for ARM is the first TASKING compiler suite to receive the Software Platform technology, which is seamlessly...Read more
December 15, 2011 | Texas instruments | 222901974
Unique Ser/Des technology supports encrypted video and audio content with full duplex bi-directional control channel over a single wire interface.