Maskless e-beam litho good for 14-nm
February 14, 2012 // Peter Clarke
French research institute CEA-Leti has said that 22-nm lines and spaces have been created using direct-write e-beam lithography technology and that the demonstrated resolution meets the requirements for both 14- and 10-nm logic processing nodes.
In addition Mapper Lithography BV (Delft, The Netherlands), the developer of the multibeam prototype lithography machine in use at CEA-Leti (Grenoble, France) and CEA-Leti have announced the extension of a collaborative R&D program called Imagine for an additional three years. This will include the installation of the first Matrix pre-production tools at CEA-Leti.
Mapper's pre-alpha platform has been installed in CEA-Leti's cleanroom since mid-2009. Both STMicroelectronics and Taiwan Semiconductor Manufacturing Co. Ltd., were participants in the original Imagine program and 50 representatives from 13 companies participated in an operational review of the research conducted in January 2012.
ST and TSMC plus Mapper, Nissan Chemical, TOK, Dow, JSR Micro, Synopsys, Mentor Graphics, Sokudo, Tokyo Electron and Aselta are participating in the project with the goal of offering maskless lithography in a commercial manufacturing environment.
"In 2012 Mapper will complete its Matrix pre-production platform with initially a 1 wafer per hour throughput capability and scalable to 10 wafers per hour," said Bert Jan Kampherbeek, CEO of Mapper, in a statement issued by CEA-Leti.
Laurent Malier, CEA-Leti CEO, said: "By continuing the Imagine program for another three years, we will continue to answer to the increasing interest showed by industry."
Li-Fi communication module wirelessly transfers data at 1-Gbps
October 31, 2014
The Fraunhofer Institute for Photonic Microsystems IPMS in Dresden has developed communication modules that can wirelessly ...
Digital Lumens raises USD23m for intelligent LED lighting solution
Bosch brings electronic fuel system, connectivity to Asian motorbikes
NXP extends NFC ecosystem to the car
Japan's MegaChips to buy MEMS maker SiTime
Freescale CEO: 'IoT isn't just buzz'
October 30, 2014
Coming after the solid third quarter results that produced higher operating margins and improving cash flow, Freescale Semiconductor's ...
3D prints world's best inverter
Research project significantly improves electronics reliability
Netscout Acquires Communications Businesses From Danaher
- Wireless Power User Guide
- Secure is the New Smart
- 5 Best Practices for Designing Flexible Test Stations
- Intelligent PLCs Expand the Internet of Things
InterviewFreescale CEO: 'IoT isn't just buzz'
Coming after the solid third quarter results that produced higher operating margins and improving cash flow, Freescale Semiconductor's CEO Gregg Lowe had every reason to be chipper and lively when EE Times ...
Filter WizardCheck out the Filter Wizard Series of articles by Filter Guru Kendall Castor-Perry which provide invaluable practical Analog Design guidelines.
Linear video channel
READER OFFERRead more
This month, Oscium is giving away three of its iMSO-204L dual analogue iOS oscilloscopes, worth USD400 each. Designed with native Lightning compatibility, the iMSO-204L transforms the iPad, iPhone, and iPod touch into an ultra-portable, two-channel oscilloscope.
Since Apple changed its connector, Oscium has been working to bring native compatibility to its customers. The third generation...MORE INFO AND LAST MONTH' WINNERS...
December 15, 2011 | Texas instruments | 222901974
Unique Ser/Des technology supports encrypted video and audio content with full duplex bi-directional control channel over a single wire interface.