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Mass air flow MEMS sensors cover the 30 to 1000 sccm range

February 27, 2012 // Julien Happich

Mass air flow MEMS sensors cover the 30 to 1000 sccm range

Posifa Microsystems launched a new line of mass air flow sensors, the PMFc3000 family, presented as a pin compatible upgrade to the Honeywell AWM3000 series. The device incorporates the latest MEMS and microelectronics innovations, replacing the common “membrane-cavity” structure with a proprietary “solid-state” thermal isolation process which brings new levels of reliability.


The PMFc3000 offers an initial output tolerance off less than 2% full scale. The sensor die uses a pair of compound thermopiles surrounding a central heating element to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise, and unsurpassed repeatability. The sensor's internal signal conditioning circuitry leverages an off-the-shelf microcontroller, providing proven reliability and low cost. The unit covers the ranges from 30 to 1000 sccm (standard cubic centimeter/minute) and can be special ordered with any full scale range between 10 and 2,000, balancing customers’ need for performance and cost efficiency. The sensors are fully calibrated and compensated over the temperature range of 0 to 50ºC

Visit Posifa Microsystems at www.posifamicrosystems.com

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