MEMS sensors feature higher integration
June 10, 2010 // Phil Ling
Analog Devices is helping industrial equipment manufacturers more easily implement stabilization, navigation, and control features by adding two highly integrated and precise MEMS inertial sensors to its product line of iSensor motion sensor products. The new sensors combine tactical grade (< 10 degrees per hour) gyroscope performance with ADIís award-winning iSensor integration and factory calibration.
The ADIS16135 iSensor precision angular rate gyro and the ADIS16385 iSensor six-degrees-of-freedom internal measurement unit (IMU) are both based on ADI's iMEMS (integrated Micro Electro Mechanical System) inertial sensor technology cores and offer an unmatched 6 degrees per hour bias stability, and angular random walk of 0.75 degrees/vhr. Extensive factory calibration results in an unmatched sensitivity of 16ppm/degrees C and bias stability to within 0.003 degrees per second over -40 to 85 degrees C. The sensors are dynamically compensated and provide a simple user interface and control via a standard SPI (serial peripheral interface) and register interface. The ADIS16135 gyro and ADIS16385 IMU are designed for a broad range of industrial and instrumentation applications including: camera stability; antenna alignment; down-hole drilling; and GPS navigation in ships, aircraft, fleet vehicles, agricultural machinery and factory robotics.
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