Nuclear fusion research aids EUV source breakthrough
July 10, 2012 // Peter Clarke
University of Washington fusion researchers think they have leapfrogged ahead of European companies trying to create a viable light source for extreme ultraviolet lithography (EUV).
Zplasma in Seattle, Washington, will be competing with such firms as Xtreme Technologies in Germany but reckons that with a 1,000 times improvement in output energy it can easily provide the source power to make EUV lithography machine throughputs viable.
The principle methods used currently are discharged-produced or laser produced plasmas of xenon or tin (DPP or LPP) but both consume large amounts of energy. More importantly neither has reached the 100- or 200-watts power level at the intermediate focus needed to get 60 to 125 wafers per hour throughput from a EUV lithography machine, such as the NXE:3300B from ASML in The Netherlands.
"We're able to produce that light with enough power that it can be used to manufacture microchips," said Uri Shumlak, a UoW professor of aeronautics and astronautics.
As with other 13.5nm wavelength light sources, the UoW beam is based on a plasma (xenon). And the UoW fusion lab's specialty is lower-cost versions of a fusion reactor, which uses electric current rather than magnets to contain the plasma and which produces plasma that is stable and long-lived.
This has advantages over a discharge spark propagated through a tin vapor or shooting a laser at a tin droplet, the group claims. "It's a completely different way to make the plasma that gives you much more control," said Brian Nelson, a UW research associate professor of electrical engineering, in the website report.
The alternative EUV light sources produce a pulse of light that lasts between 20 and 50 microseconds The Zplasma light source lasts about 1,000 times longer and this results in more light output, and more light onto the wafer. The UoW team has been supported with grants and gifts to allow them to verify the production of 13.5-nm wavelength light and to reduce the size of the equipment.
The company is now led by Henry Berg, a technology entrepreneur, as CEO. The company is now seeking venture capital from corporate investors who can help Zplasma integrate its light sources with existing industrial processes.
CoolCube circuit stacking moves to FinFET process
August 03, 2015
The CEA-Leti research laboratory at Grenoble France, has reported that its CoolCube 3D interconnect technology is suitable ...
Is NextInput next winner in Apple products?
Fraunhofer rolls security platform for cars
The Filter Wizard: When off the shelf won't do, Part 1
Butterflies help boost solar panel power by 50 per cent
Facebook unveils solar-powered Internet-beaming drone
August 03, 2015
Social networking giant Facebook (Cambridge, MA) has unveiled a full-scale version of its solar-powered drone designed to ...
Indian fab project hires former GloFo exec
OmniVision shareholders approve Seagull takeover
Ancient RF teardown: crude but effective
- Dual Phase Buck Controller Drives High Density 1.2V/60A Supply with Submilliohm DCR Sensing
- Test environment for the positioning elements of wearable devices
- Automotive Circuit Protection using Littelfuse Automotive TVS Diodes
- Top 5 Challenges for testing Today's Consumer Electronics
InterviewGlobalfoundries' CEO on why FD-SOI and why now
With its latest news Globalfoundries Inc. has not only confirmed itself as a supporter of the fully-depleted silicon-on-insulator (FD-SOI) approach to IC manufacturing but that it also thinks sufficiently ...
Filter WizardCheck out the Filter Wizard Series of articles by Filter Guru Kendall Castor-Perry which provide invaluable practical Analog Design guidelines.
Linear video channel
READER OFFERRead more
This month, Novelda is giving away two full XeThru Inspiration kits worth 1499 US Dollars each, for EETimes Europe's readers to experiment first hand with its XeThru technology.Based on the use of radio waves, rather than infrared, ultrasound or light, the company's X2M1000 Inspiration modules can detect presence just from the chest movement while breathing, and measure both the rate and... MORE INFO AND LAST MONTH' WINNERS...
December 15, 2011 | Texas instruments | 222901974
Unique Ser/Des technology supports encrypted video and audio content with full duplex bi-directional control channel over a single wire interface.