Nuclear fusion research aids EUV source breakthrough
July 10, 2012 // Peter Clarke
University of Washington fusion researchers think they have leapfrogged ahead of European companies trying to create a viable light source for extreme ultraviolet lithography (EUV).
Zplasma in Seattle, Washington, will be competing with such firms as Xtreme Technologies in Germany but reckons that with a 1,000 times improvement in output energy it can easily provide the source power to make EUV lithography machine throughputs viable.
The principle methods used currently are discharged-produced or laser produced plasmas of xenon or tin (DPP or LPP) but both consume large amounts of energy. More importantly neither has reached the 100- or 200-watts power level at the intermediate focus needed to get 60 to 125 wafers per hour throughput from a EUV lithography machine, such as the NXE:3300B from ASML in The Netherlands.
"We're able to produce that light with enough power that it can be used to manufacture microchips," said Uri Shumlak, a UoW professor of aeronautics and astronautics.
As with other 13.5nm wavelength light sources, the UoW beam is based on a plasma (xenon). And the UoW fusion lab's specialty is lower-cost versions of a fusion reactor, which uses electric current rather than magnets to contain the plasma and which produces plasma that is stable and long-lived.
This has advantages over a discharge spark propagated through a tin vapor or shooting a laser at a tin droplet, the group claims. "It's a completely different way to make the plasma that gives you much more control," said Brian Nelson, a UW research associate professor of electrical engineering, in the website report.
The alternative EUV light sources produce a pulse of light that lasts between 20 and 50 microseconds The Zplasma light source lasts about 1,000 times longer and this results in more light output, and more light onto the wafer. The UoW team has been supported with grants and gifts to allow them to verify the production of 13.5-nm wavelength light and to reduce the size of the equipment.
The company is now led by Henry Berg, a technology entrepreneur, as CEO. The company is now seeking venture capital from corporate investors who can help Zplasma integrate its light sources with existing industrial processes.
Automotive King Redefines Future
July 01, 2015
Automotive is becoming one of the largest sectors of the electronics market pulling along with it the major suppliers. Renesas, ...
Elektrobit is now Bittium
Exploring through-wall presence detection
High-speed converters aid record terabit field trial
Sony reaches for the crowd with e-paper universal remote
Two-switch-quasi-resonant Flyback converter
July 01, 2015
A flyback converter is very attractive in that it is typically the least expensive isolated topology because it uses the ...
Could India's analog wafer fab be moving south?
Do head-up displays lead the wrong way to safety?
Merck buys display quantum dot company
- Critical Requirements in High Speed Signal Generation Applications
- The 400XAC Series: Two Major Advantages that Simplify Functional Testing
- A Smart Way to Drive ECU Consolidation
- Autonomous Driving: An Eye on the Road Ahead
InterviewCEO interview: Cadence is about enablement, collaboration
EDA companies are being asked to provide expertise from the circuit- to the system-level observes Lip-Bu Tan, CEO of EDA software vendor Cadence Design Systems Inc. Covering such a breadth of endeavour ...
Filter WizardCheck out the Filter Wizard Series of articles by Filter Guru Kendall Castor-Perry which provide invaluable practical Analog Design guidelines.
Linear video channel
READER OFFERRead more
This month, Novelda is giving away two full XeThru Inspiration kits worth 1499 US Dollars each, for EETimes Europe's readers to experiment first hand with its XeThru technology.Based on the use of radio waves, rather than infrared, ultrasound or light, the company's X2M1000 Inspiration modules can detect presence just from the chest movement while breathing, and measure both the rate and... MORE INFO AND LAST MONTH' WINNERS...
December 15, 2011 | Texas instruments | 222901974
Unique Ser/Des technology supports encrypted video and audio content with full duplex bi-directional control channel over a single wire interface.