Replacement metal gate options for further transistor scaling
June 13, 2012 // Julien Happich
Imec is testing and evaluating various options for further transistor scaling using high-k dielectrics and metal gates in a replacement metal gate (RMG) integration schema.
Although RMG technology is inherently more complex than gate-first integration, it has a number of advantages that allow increasing the device performance and that widen the choices in terms of high-k and metal gate materials.
One of the current challenges to enable further device scaling is the choice of gate dielectric and gate electrode. For the selection of the gate electrode, the key parameters to consider are the work function, resistivity and compatibility with CMOS technology. Further scaling also requires continued improvement of the channel mobility, adding the options for improved stress management and also reliability control as a first-order consideration in the choice of materials and processes.
In the industry, the RMG approach is rapidly becoming the integration scheme of choice, and an alternative for the gate-first approach. In RMG, the high-k gate dielectric is deposited in the beginning of the flow or just prior to gate electrode deposition and the gate electrode is deposited after the formation of the junctions.
A clear advantage is the enhancement of the channel stress in shorter devices because of the dummy-gate removal, an intrinsic step in RMG flow. RMG also allows metal gate processes with a lower thermal-budget, which broadens the range of material options for work-function tuning and reliability control. Additional advantages are a lower gate resistance compared to gate-first, important for RF CMOS, and more room for mobility improvement.
With the eye on further scaling to sub-20nm technology nodes and in collaborating with the major tool suppliers, imec is now evaluating RMG technology for different applications, looking at different integration options, materials selection and engineering, and compatibility with advanced modules and device architectures.
This research is performed in cooperation with imec's key partners in its core CMOS programs Globalfoundries, INTEL, Micron, Panasonic, Samsung, TSMC, Elpida, SK hynix, Fujitsu and Sony.
Visit imec at www.imec.beAll news
Step aside MEMS. Here comes NEMS
December 10, 2013
Automotive industry sees innovation in products, not business models
Big moves in chip vendor top 20 ranking
Extendible processors go head to head backed by EDA giants
Koch Industries acquires Molex for USD7.2 billion
EnOcean joins the OSGi Alliance to define universal open interface for energy harvesting wireless
December 10, 2013
Energy harvesting wireless solutions specialist, EnOcean, has joined the OSGi Alliance and will now actively contribute to ...
GaN-on-silicon LEDs to grow market share to 40 percent by 2020
Pebble CEO turns back clock
Tyndall National Institute captures snapshots of moving atoms under bursts of light
- 3mm × 3mm QFN IC Directly Monitors 0V to 80V Supplies
- UltraCMOS® Semiconductor Technology Platforms: A Rapid Advancement of Process & Manufacturing
- Adaptive Cell Converter Topology Enables Constant Efficiency in PFC Applications
- Isolated 4-Channel, Thermocouple/RTD Temperature Measurement System with 0.5°C Accuracy
InterviewPerformance monitoring solution helps provide intelligent control of high power systems
A performance monitoring solution designed to enable companies to monitor high power IGBT module systems in locomotive, wind turbine, High Voltage DC and industrial drive applications was unveiled this ...
Filter WizardCheck out the Filter Wizard Series of articles by Filter Guru Kendall Castor-Perry which provide invaluable practical Analog Design guidelines.
Linear video channel
READER OFFERRead more
Internet of Things (IoT) manufacturer Ciseco has launched the Raspberry Pi ‘Wireless Inventors Kit’ (RasWIK), featuring 88 pieces to provide everything a Pi owner needs to follow a series of step-by-step projects or to create their own wireless devices, without the need for configuration or even writing code.
RasWIK has been designed to be highly accessible, demystifying the dark art of wireless and enabling anyone with basic computing skills to begin building wireless devices with a Raspberry Pi. You can create anything from a simple traffic light, to a battery monitor, or even a temperature gauge that sends data to the Xively IoT cloud so billions can access the data.This month, Ciseco is giving away twelve Raspberry Pi Wireless Inventors kits, worth £49.99 each for EETimes Europe's readers to win.
And the winners are...
In our previous reader offer, Farsens was giving away five kits for EEtimes Europe readers to evaluate its FenixVortex, Kineo and X1 wireless, battery free sensor tags.
Lucky winners include Mr A. Neil from the UK, Mr. E. Delvaux from Belgium, Mr Lengal from the Czech Republic, Mr H. Bijlsma from the Netherlands, and Mr G. Pfaff from Germany. All should be receiving their packages soon. Lets wish them some interesting findings with their projects.
December 15, 2011 | Texas instruments | 222901974
Unique Ser/Des technology supports encrypted video and audio content with full duplex bi-directional control channel over a single wire interface.