Linear piezo nanopositioning stages offer 0.02nm resolution

May 27, 2016 // By Julien Happich
Aerotech’s QNPHD linear piezo nanopositioning stages provide the benefits of both a stage and actuator in one compact, high-stiffness package.

With a direct-metrology, capacitive sensor feedback option, high resonant frequencies up 6300Hz and high load capacity, the QNPHD is well suited for a wide range of high-speed and high-precision applications such as scanning probe microscopy, disc-drive testing, and semiconductor wafer articulation.

A direct-drive actuation design and optimized structure enable millisecond response and move-and-settle times. FEA optimized precision flexures ensure high-stiffness, long device life, and high-dynamics while maintaining excellent geometric performance (straightness and angular errors) for critical nanopositioning applications.

Optional closed-loop feedback using a unique capacitive sensor design allows for 0.02nm resolution and 0.02% linearity errors. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.

The QNPHD is available with rear and side cable exit options along with mounting features for both horizontal and vertical orientations.

Visit Aerotech at www.aerotech.com