ST extends MEMS pilot line project

February 09, 2015 // By Peter Clarke
STMicroelectronics NV is set to benefit from an extension of the Lab4MEMS pilot project that has been agreed by the European Nanoelectronics Initiative Advisory Council (ENIAC) Joint Undertaking (JU), a public-private partnership in nanoelectronics.

Lab4MEMS 2 is an extension of an original project that was announced in April 2013. It has a budget of €26 million (about $30 million) that will be used to focus on developing micro-optical electromechanical systems (MOEMS) that merge micro-optics with MEMS.

The project has 20 partners led by ST as coordinating partner and will expand ST's 200mm MEMS wafer manufacturing facility in Agrate Brianza while adding optical technologies. The project will also evaluate the possibility of a move to 300mm-diameter wafers.

Meanwhile the original project will maintain its emphasis on developing a pilot line for next-generation MEMS devices including the ability to integrate piezoelectric materials, magnetic materials and 3D packaging.

MOEMS is platform for optical switches, micro-mirror devices and dynamic displays, bi-stable devices, and optical shutters useful in micro-projectors, laser micro-scanners, human-machine interfaces, and micro-spectrometers. One goal of the project is to optimize the production of dual single-axis mirrors as well as to research the possibilities for the development of the dual-axis single mirror.

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